Cryopumps are also widely used in today's life. Many people may not have heard of cryopumps. Cryopumps are a type of vacuum pump that uses low-temperature surface condensation gas. The advantage is that the pumping power is the largest. Today, let's take a look at cryogenic pumps How the pump works.
The working principle of the cryopump is to use the gas to physically adsorb on the ultra-low temperature surface to achieve the effect of exhausting. It is an effective and fast method to obtain a clean vacuum.
The cryopump can reach extremely high vacuum (10-11Pa), and has the advantages of fast exhaust speed, no oil and unlimited installation direction.
On the first-stage cold stage of the cryopump, a shielding cover and baffle are set, and the temperature is maintained at 80K. The secondary cooling stage was maintained at 15K, and a cryogenic cover and activated carbon adsorbent were set on it.
Water vapor is solidified on the 80K shield and 80K baffle; nitrogen, oxygen and argon are solidified on the 15K cryogenic cover; hydrogen, helium and neon are adsorbed on the adsorbent inside the 15K cryogenic cover. The cryopump can exhaust all gases, but if the amount of adsorbed gas is too large, the exhaust speed will be reduced. In this case, it is necessary to heat the cryopump, release the adsorbed gas, and use it again.
Cryopump Features
A cryopump is a vacuum pump that uses a low temperature surface to condense gas, also known as a condensate pump. The cryopump can obtain a clean vacuum with the highest pumping rate and the lowest ultimate pressure, and is widely used in the research and production of semiconductors and integrated circuits, as well as molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters and space simulation devices, etc. aspect.
A cryopump is a vacuum pump that uses the condensation effect of a very low temperature cooling surface (≤77K) to remove gas from the system. Since the 1960s, cryogenic pumping has been more and more widely used in the acquisition and application of vacuum.
A cryopump is a clean vacuum pump. Because the cryogenic medium is only a refrigerant that cools the suction surface of the pump and is stored or circulated in a closed container, it does not have any contact with the vacuum space. This feature is critical for certain vacuum systems that require clean, oil-free vacuum systems.
Cryopumps can achieve very low partial pressures and very high pumping speeds for most gases. When the cryopump works in liquid helium medium, it also has the advantages of great actual pumping capacity and non-selective pumping (except for helium).
Cryopumps play a vital role in the research and production of semiconductors and integrated circuits, molecular beam research and other fields. It is a clean vacuum pump. The above is all about the working principle of cryopumps.